A semiconductor fab required an expansion to house additional chemical storage and Chemical Dispense Units (CDU) to support production. EEA was tasked with designing
this project which posed unique challenges due to a constrained site and aging existing facilities.
The design included renovating an existing H-3 chemical storage area to house new
CDUs, which required extending process utilities, addressing legacy code issues, and replacing the area’s HVAC and corrosive exhaust. In addition, a portion of an adjacent area was converted to H-3 occupancy and an H-3 occupancy expansion was designed to provide additional space for chemical storage. New chemical distribution piping was designed to provide bulk chemical delivery to numerous tools in order to eliminate hand pouring.
EEA provided MEP design and also was the prime consultant leading the team that
included architecture, structural engineering, fire protection, civil engineering, and specialty process engineering.
The team worked closely with fab operations to phase the design in order to minimize
disruptions and impacts to production.